离子束设备与工艺解决方案的国产化替代

佛山市博顿光电科技有限公司实现高性能离子源及离子束装备的全国产化。在航天探测领域实现 SiC 光学遥感反射镜大面积高均匀性低温镀银；实现激光陀螺反射镜的亚纳米抛光修形、5PPM 超低损耗极致指标镀膜；在国产光刻机镜头的超光滑镜片亚纳米抛光修形、掩膜版多层纳米级镀膜 / 刻蚀（钼硅）、紫外超低吸收镀膜等工艺上得到应用。高性能离子源产品进入半导体领域并实现批量和标杆客户复购，开发的矩形射频离子源产品，在高温超导带材领域实现超薄超高精度种子层薄膜的低温大面积卷绕式镀膜量产。
 

IBDTEC has realized a full domestic production of high-performance ion sources and ion beam equipment. In the field of aerospace exploration, large-area high-uniformity low-temperature silver plating of SiC optical remote sensing mirrors has been achieved; sub-nanometer polishing and shaping of laser gyro mirrors and 5PPM ultra-low-loss ultimate index coating have been managed; and, such technologies have been applied to sub-nanometer polishing and shaping of ultra-smooth lenses, masked multi-layer nano-scale coating/etching (molybdenum silicon), ultraviolet ultra-low-absorption coating and other processes of domestic lithography machine lenses. High-performance ion source products have entered the semiconductor sector and been repurchased in batch and by benchmark clients. The rectangular RF ion source products developed by IBDTEC has achieved low-temperature large-area roll-type mass coating of ultra-thin and ultra-high-precision seed layer films in the field of high-temperature superconducting strip materials.

离子束装备，超精密微纳加工，国产替代

Ion Beam Equipment, Ultra-precise Micro/Nano Processing, Domestic Substitution